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Design and construction of instruments for plasma characterization and growth of thin films.
Publications:
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1. A magnetron sputtering system for the preparation of patterned thin films and in situ thin film electrical resistance measurements, Review of Scientific Instruments, Volume 78, October 2007, 103901 (article)
2. Digital smoothing of the Langmuir probe I-V characteristic, Review of Scientific Instruments, Volume 79, July 2008, 073503 (article)
Ţessi síđa hefur veriđ heimsótt