Research overview

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Circuit elements on the nanoscale

Electrical conductivity of ultrathin metallic films is studied in-situ during growth

Plasma chemistry

Modelling the plasma chemistry of low pressure high density discharges

Argon
Oxygen
Nitrogen

Magnetron sputtering discharge

Characterization of a dc magnetron sputtering discharge

Using a Langmuir probe
Optical emission spectroscopy (OES)

Plasma characterization and instrumentation

Design of instruments

Langmuir probe
Magnetron sputtering discharge
In-situ characterization of thin films during growth

High power impulse magnetron sputtering discharge (HiPIMS)

Characterization of the high power impulse magnetron sputtering discharge (HiPIMS)

Using a Langmuir probe

Photovoltaics

Development of inexpensive solar cells from thin film silicon grown by liqied phase epitaxy (LPE).